Last Updated :2025/11/21

secondary ion mass spectrometry

Noun
uncountable
Japanese Meaning
エネルギーの高いイオンビームを用いて、固体表面から原子や分子を飛び出させ、その飛び出した成分の質量を測定することで、固体の三次元構造を可視化する技術。
What is this buttons?

半導体ウェハ内の微量元素の三次元分布を可視化するため、表面原子をエネルギーの高いイオンビームではぎ取りながら分析する二次イオン質量分析法を使用しました。

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(physics) A technique used to visualize the three-dimensional structure of solids by employing an energetic ion beam to fragment the atomic or molecular constituents from a surface

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secondary ion mass spectrometry

We used secondary ion mass spectrometry to map the distribution of trace elements within the semiconductor wafer.

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We used secondary ion mass spectrometry to map the distribution of trace elements within the semiconductor wafer.

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