Last Updated
:2025/11/21
secondary ion mass spectrometry
Noun
uncountable
Japanese Meaning
エネルギーの高いイオンビームを用いて、固体表面から原子や分子を飛び出させ、その飛び出した成分の質量を測定することで、固体の三次元構造を可視化する技術。
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(physics) A technique used to visualize the three-dimensional structure of solids by employing an energetic ion beam to fragment the atomic or molecular constituents from a surface
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secondary ion mass spectrometry
We used secondary ion mass spectrometry to map the distribution of trace elements within the semiconductor wafer.
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We used secondary ion mass spectrometry to map the distribution of trace elements within the semiconductor wafer.
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