(materials science) Quality of an epitaxial layer, especially coherence, crystallinity and smoothness.

In an epitaxial way.

Of, pertaining to, or employing epitaxy

(crystallography) An overgrowth in which the overlying crystal is either induced into the same orientation, or otherwise grows under the influence of the underlying crystal into the same orientation.

plural of epitaxy

In semiconductor fabrication: a single crystal layer formed on top of a single crystal substrate.

plural of epitaxial layer

A technique, used in the production of thin films of ultra-pure semiconductors, that grows the film by condensation of evaporated atoms.

a form of molecular beam epitaxy that uses a gaseous source