Last Updated
：2025/11/21
optical flat
Noun
Japanese Meaning
（光学計測用具として用いられる）高品質な石英ガラスの円盤で、少なくとも一面が研削・研磨され、全体の平面性のばらつきが50ナノメートル未満、表面仕上げが5マイクロフィニッシュ以下となっており、干渉計を用いて他の表面の平坦度を測定するために使用される。
（ plural ）
Quizzes for review
(optics) A disk of high-quality quartz glass having at least one side ground and polished with a deviation in flatness less than 50 nanometers all over, and a surface quality of 5 microfinish or less; used, in an interferometer, to measure the flatness of other surfaces.
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optical flat
The technician placed the optical flat on the interferometer stage to check for wafer surface irregularities.
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The technician placed the optical flat on the interferometer stage to check for wafer surface irregularities.
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