Last Updated
：2025/11/21
xenon difluoride
Noun
Japanese Meaning
（化学）結晶性の物質で、化学式 XeF₂。各種表面改質プロセスにおいてフッ素化剤および酸化剤として、また半導体製造におけるエッチング剤として使用される。
Quizzes for review
(chemistry) a crystalline substance, XeF₂, used as a fluorinating agent and oxidizing agent in various surface modification processes, and as an etching agent in semiconductor production
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xenon difluoride
In the wafer fabrication lab, engineers used xenon difluoride to selectively etch silicon microstructures without damaging sensitive underlying layers.
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In the wafer fabrication lab, engineers used xenon difluoride to selectively etch silicon microstructures without damaging sensitive underlying layers.
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