Last Updated：2025/11/23
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To achieve conformal coatings on complex 3D features for next-generation devices, engineers turned to MOALD for its atomically precise, layer-by-layer control.
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To achieve conformal coatings on complex 3D features for next-generation devices, engineers turned to MOALD for its atomically precise, layer-by-layer control.
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MOALD
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Japanese Meaning
金属有機原子層堆積（MOALD）は、金属有機化合物を用いた原子層堆積法であり、原子レベルで層ごとに精密に制御された自己制限的な堆積プロセスを指します。これは、次世代のマイクロエレクトロニクスやナノテクノロジーの分野で、High-k誘電体層、金属およびメタルゲート電極の成長に利用される技術です。
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