silicon tetrafluoride
In a way that trails.
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(inorganic chemistry) The binary compound of silicon and fluorine SiF₄, a colourless, poisonous gas with a pungent odour, used in the production of silicon semiconductors.
plural of loony bin
四フッ化ケイ素（SiF4）は無色で有毒な気体であり半導体製造に使われるため、研究所では気密封止と厳格な安全対策が求められます。
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