Last Updated:2025/11/20

The lab upgraded its RTP system to improve throughput and reduce thermal stress on the wafers.

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The lab upgraded its RTP system to improve throughput and reduce thermal stress on the wafers.

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研究室はスループットを向上させ、ウェーハの熱ストレスを低減するために急速熱処理システムをアップグレードした。

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